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位置:首页 > 品牌 > Sigma-Aldrich > 双(甲基-η5-环戊二烯)甲氧基甲基锆

Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium

双(甲基-η5-环戊二烯)甲氧基甲基锆

品牌
Sigma-Aldrich
货号
725471
规格纯度
packaged for use in deposition systems
参考价格
8175.2 *本价格含增值税费
促销
服务
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  • 包邮
  • 增值税票
数量
-+
产品名称:
Bis(methyl-η5-cyclopentadienyl)methoxymethylzirconium
ZrD-CO4
ZRCMMM
双(甲基-η5-环戊二烯)甲氧基甲基锆
产品介绍:

产品说明

一般描述

Atomic number of base material: 40 Zirconium

应用

Advanced precursor for atomic layer deposition of ZrO2 thin films. Hafnium and zirconium oxides are leading candidates to replace silicion dioxide as the gate oxide in a variety of semiconductor and energy applications. Excellent properties of HfO2 and ZrO2 films make them especially attractive for gate oxide replacement and as potential insulating dielectrics for capacitive elements in memory devices such as DRAM.
Precursors Packaged for Depositions Systems

包装

10 g in stainless steel cylinder
Packaged in stainless steel cylinders compatible with conventional deposition systems. Precursors may be used in liquid injection systems as dilute solutions and in combination with a variety of other sources to deposit mixed oxides.

特点和优势

Compatible with a variety of oxidants in ALD growth processes across a wide temperature range exhibiting self limiting growth up to 400 ℃. Precursor volatility and thermal stability properties enable easy materials transport from bubblers into conventional deposition tools.

基本信息

线性分子式Zr(CH3C5H4)2CH3OCH3
分子量295.53
MDL编号MFCD16875687
PubChem化学物质编号329764163
NACRESNA.23

产品性质

形式liquid
reaction suitabilitycore: zirconium
颜色 colorless
bp110 ℃/0.5 mmHg (lit.)
密度1.27 g/mL±0.01 g/mL at 25 ℃ (lit.)
SMILES stringC[C]1[C][C][C][C]1.C[C]2[C][C][C][C]2.C[Zr]OC
InChI1S/2C6H7.CH3O.CH3.Zr/c2*1-6-4-2-3-5-6;1-2;;/h2*2-5H,1H3;1H3;1H3;/q;;-1;;+1
InChI keyLFGIFPGCOXPKMG-UHFFFAOYSA-N

安全信息

象形图GHS07
警示用语:Warning
危险声明H302 - H315 - H319
预防措施声明P305 + P351 + P338
危险分类Acute Tox. 4 Oral - Eye Irrit. 2 - Skin Irrit. 2
储存分类代码10 - Combustible liquids not in Storage Class 3
WGKWGK 3
闪点(F)226.4 °F
闪点(C)108 ℃

Sigma-Aldrich

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